 |
 |
| LASER CVD REPAIR |
| LM530A/LM535A series |
|
| These units repair black and white defects that arise during the mask testing process for photo masks that are essential to LCD and other manufacturing processes. In response to the increase in size over recent years, large mask boards are supported of up to 1,400 (X) x 1,600 (Y) x 15mm (t) in size. |
Special & Advantages |
|
|
|
| LM530A |
|
| Can repair black and white type defects |
| This unit repairs both black and white defects. |
|
| Secure, accurately contoured processing results |
| Using an LD pump laser, secure and accurately contoured processing results can be achieved with little heat effect. In particular, with regard to the repair of white defects, this unit features a high throughput and the capacity to support large masks, through repair with laser CVD, which employs a gas curtain method that does not use a process chamber. |
|
| LM530A This unit is the next model up from the LM530A, achieving repairs of even higher quality. |
|
| Options |
|
 |
Equipped with FHG laser oscillator (improved adhesion) |
|
Transmission measurement feature (for halftone masks) |
|
Gas concentration monitoring feature |
|
|
| Applications |
|
|
|
|
White and black defect repairs in large, high precision, LCD photo masks. |
|
|
| Processing example |
|
|
|
Example of AFM observation of CVD-processed area |
|
|
|
 |
 Top of this page |
|
|
|
|
