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Comment Special  & Advantage Specification

WAFER MARKER SL473 series

Realizing stable & high quality marking and long term maintenance free by air cooling type LD pumped laser
and laser output automatic correction function.

High system extensibility of option function such as marking checking function by Wafer-ID reader
(※1),
Online communication software
(※1) & others.
※1=OPTION

Feature 1. Easy operation

・Easy operation by user-friendly 15 inch LCD touch panel
・Flexible wafer-size changing function by recipe changes (※1)



Feature 2. Saving history

・Production record, Error record, Communication records are saved in log file.



Feature 3. Various Applicable marking

・Switchable front-side/Reverse-side marking (※1)
・Soft marking
・Hard marking (※1)
・Marking on GaAs wafer (※1)
・Marking on SiC, GaN wafer (SL473DT5/FT5)
※1=OPTION

 Soft marking

SiC

GaN