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Comment Special & Advantage Specification

WAFER MARKER SL473 series

Model SL473DS5 SL473DT5 SL473FS5 SL473FT5 SL473GS5
Laser Type Nd:YAG laser
(SHG)
λ=532nm
Nd:YLF laser
(THG)
λ=349nm
Nd:YAG laser
(SHG)
λ=532nm
Nd:YLF laser
(THG)
λ=349nm
Nd:YAG laser
(SHG)
λ=532nm
Character Font SEMI-OCR (Dot, Engraving) , OCR-B (Engraving)
Marking Target Wafer surface observe-side (Option: Reverse-side, Both-side)
Throughput(※1) 70pcs/h 240pcs/h 170pcs/h
Available numbers of Carrier 1 2 or 4 1 or 2
Wafer Size 4, 5, 6, 8 inch
(Option: 2.3 inch, multiple size)
4, 5, 6, 8 inch
(Option: multiple size)
12 inch
Power supply voltage AC200V±20V, 15A ,
Single phase, 50/60Hz
AC200V±20V, 20A , Single phase, 50/60Hz 
Vacuum utility required -77±10kPa, 0.01㎥/min
Compressed air utility required More than 490kPa, 0.01㎥/min N/A 560±40kPa, 0.01㎥/min
Other major options Online communication software, Dust collector unit,
Wafer ID reader, Marking inspection function, others
Dimension(※2)
[mm]
Approx.
1,100(W)×1,500(D)×1,505(H)
Approx. 1,220(W)×1,344(D)×1,492(H)
(2 carriers type)
Approx. 1,220(W)×1,646(D)×1,492(H)
(4 carriers type)
Approx. 1,640(W)×1,920(D)×1,550(H)
Main unit Weight Approx. 650kg Approx. 850kg(2 carriers type)
Approx. 900kg(4 carriers type)
Approx. 1,000kg
(※1)Marking condition: Character size 1.6mm, 12 Characters, 5x9 dots, one shot
(※2)Projection portion is not included.
(※3)Equipment exhaust method could be discussed separately.
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