WAFER MARKER

Contribution for improving traceability of semiconductor manufacturing process

Wafer Marker SL473 Series

Wide products lineup not only for the marking on Si, GaAs wafer, but also for SiC, GaN, other wafer. Contribution for improving traceability of semiconductor manufacturing process with wide products line up for various wafer material, size, and production capacity

Wafer Marker SL473 Series

FEATURE

task_altStable marking with good visibility

Stable marking with good visibility by suitable laser oscillator for target wafer materials and the automated laser-power compensation function

Stable marking with good visibility

task_altEasy operation with high versatility

Easy operation changing recipes for marking on various different wafer sizes and materials.
(Option: Multiple wafer size, reverse-side marking)

task_altExtensive options and expandability

Online communication protocol, Wafer ID reader, Marking inspection function, Dust collector unit

Extensive options and expandability

Standard Model

SL473DS / DT Series

Standard Model for 1 port

APPLICATION

SL473DS Series: Soft marking for Si wafer, GaAs and InP wafer

SL473DT Series: SiC, GaN wafer and above mentioned wafer

soft marking

MAIN SPECIFICATION

Model SL473DS Series SL473DT Series
Laser Type Nd: YAG-SHG laser
Wavelength: 532 nm
Nd: YLF-THG laser
Wavelength: 349 nm
Number of port for Carrier 1
Wafer Size 4, 5, 6, 8 Inch each
(Option: 2, 3 inches, multiple size)
Dimensions [mm] (*1) 1,100 (W) x 1,500 (D) x 1,505 (H) ㎜
Weight(Main body) Approx. 650 kg
  • (*1) It does not include protrusions