WAFER MARKER SL473 series
Laser marking system for semiconductor wafers.
Marking product names, lot numbers, control numbers, etc. on the front
or reverse-side（※1) of wafer surface.
（※1）OPTION: reverse-side marking
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It is applicable not only Si and GaAs wafer, but also compound wafer such
as SiC and GaN by model SL473DT5/FT5 equipped UV laser.
| System Line-up:
・Basic model for Low-volume processing (DS5/DT5) ,
・High Throughput model for high-volume processing (FS5/FT5)
・12inch model (GS5)
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＝OPTION＝
・2,3inch
・multiple size |
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＝OPTION＝
・2,3inch
・multiple size |
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=OPTION=
・multiple size |
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