WAFER MARKER SL473 series
Laser marking system for semiconductor wafers.
Marking product names, lot numbers, control numbers, etc. on the front
or reverse-side（※1) of wafer surface.
（※1）OPTION: reverse-side marking
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It is applicable not only Si and GaAs wafer, but also new generation material
such as SiC and GaN by model SL473DT2 equipped UV laser.
| System Line-up:
・New model for new generation material (DT2),
・Basic model for Low-volume processing (DS2) ,
・High Throughput model for high-volume processing (FS4)
・12inch model (GS3)
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＝OPTION＝
・3,8inch
・multiple size |
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＝OPTION＝
・3,8inch
・multiple size |
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=OPTION=
・4inch ・multiple size ・4 carriers |
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