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Comment Special & Advantage Specification

WAFER MARKER SL473 series

Laser marking system for semiconductor wafers.
Marking product names, lot numbers, control numbers, etc. on the front or reverse-side
(※1) of wafer surface. 
(※1)OPTION: reverse-side marking



It is applicable not only Si and GaAs wafer, but also compound wafer such as SiC and GaN by model SL473DT5/FT5 equipped UV laser.

System Line-up:
・Basic model for Low-volume processing (DS5/DT5) ,
・High Throughput model for high-volume processing (FS5/FT5)
・12inch model (GS5)





=OPTION=
・2,3inch
・multiple size
=OPTION=
・2,3inch
・multiple size


=OPTION=
・multiple size